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The Center for Research Equipment, Korea Basic Science Institute (KBSI) performs damage removal and smoothing on a BK7 ground surface and a Zerodur ground surface using their Q22-1200 meter-class MRF and pad polishing machine from QED Technologies.
Some advanced technologies require tight specifications around thickness and total thickness variation without compromising other critical tolerances such as surface finish, subsurface damage and contamination. Achieving next generation accuracy and thickness control requirements is extremely difficult using conventional manufacturing processes.